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2423篇 您的检索式:期刊名="Vac"
    题名 作者 年代 出处 被引量
1显示文摘ChenKT ShiDT Chen H 1997J Vac Sci Technol A1997,15,3:2
2Field emission characteristics of boron nitride films deposited on Si substrates with cubic boron nitride crystal grains 显示文摘Kimura C Yamamoto T Sugino T 2001J Vac Sci Technol B2001,19,:2
3Microstructure and properties of Ti-Si-N nanocomposite films显示文摘Hu X P Li G Y Gu M Y 2002J Vac Sci Tech A2002,20,6:2
4Mircroradiographic characterization of metal and polymer coated microspheres显示文摘Singleton R M Weir J T 1981J Vac Sci Technol1981,18,3:2
5Polysilicon thin film transistors fabricated on low temperature plastic substrates显示文摘Carey P Smith P Theiss D 1999J Vac Sci Technol A1999,17,:1
6Synthesis and microstructure of gallium phosphide nanowires 显示文摘 Zheng Y F Wang N 2001J Vac Sci Tech B2001,19,4:1
7TiN film coatings on alumina radio frequency windows显示文摘Michizono S Kinbara A Saito Y 1992J Vac Sci Technol1992,10,4:1
8Fabrica-tion of nanohole array on Si using self-organized porous alumina mask显示文摘SHINGUBARA S OKINO O MURAKAMI Y 2001J Vac Sci Technol:B2001,19,5:1
9Advanced time-multiplexed plasma etching of high aspect ratio silicon structures 显示文摘M A Blauw G Craciun W G Sloof 2002J Vac Sci Technol2002,20,6:1
10Nanoscale Layer Removal of Metal Surface by Scanning Probe Microscope Scratching 显示文摘Sumancgi T Endo T Kuwabam K 1995J Vac Sci Technol1995,13,3:1
11GaN, AlN, and InN: A review显示文摘Strite S Morko H 1992J Vac Sci Technol1992,10,4:1
12Auger and photoelection line energy erlation ships in aluminum-oxygen and Silicon-oxygen compounds显示文摘Wagner C D Passoja D E Hillery H F 1982J Vac Sci Technol1982,21,:1
13Gas-phase production of carbon single-walled nanotubes from carbon monoxide via Hipco process:a parametric study显示文摘Michael J Bronikowski Peter A Willis Daniel T Colbert 2001J Vac Sci Technol2001,19,4:1
14Developments in broad beam ion source technology and applications显示文摘Harper J M E Cuomo J J 1983J Vac Sci Technol A1983,1,2:1
15Mask fabrication for projection electron- beam lithography incor-porating the SCALPEL technique显示文摘J A Liddle H A Huggins S D Berger 1991J Vac Sci Technol1991,9,6:1
16Low interface state density oxide-GaAs structures fabricated by in situ molecular beam epitaxy显示文摘Hong M Passlack M Mannaerts J P 1996J Vac Scl Technol1996,14,3:1
17Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering显示文摘Stearns D G Rosen R S Vernon S P 1991J Vac Sci Technol1991,9,:1
18Lithography using ultrathin resist films显示文摘See E G Pike C Bell S 2000U J Vac Sci Technol B2000,18,:1
19Particle bombardment effects on thin film de- position: A review显示文摘Mattox D M 1989J Vac Sci Technol1989,17,3:1
20Compensation methods for buried defects in extreme ultraviolet lithography masks显示文摘C H Clifford T T Chan A R Neureuther 2011J Vac Sci Technol B2011,29,01:1
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