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High powerλ~8.5μm quantum cascade laser grown by MOCVD operating continuous-wave up to 408 K

查看全文 作  者:Teng [1,2,3]Fei;Shenqiang [1,2]Zhai;Jinchuan [1,2]Zhang;Ning [1,2]Zhuo;Junqi [1,2,3]Liu;Lijun [1,2,3]Wang;Shuman [1,2]Liu;Zhiwei [1,2]Jia;Kun [1,2,3]Li;Yongqiang [1,2,3]Sun;Kai [1,2]Guo;Fengqi [1,2,3]Liu;Zhanguo [1,2,3]Wang 高影响力作者 机构地区:[1]Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;[2]Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices,Beijing 100083,China;[3]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China高影响力机构 出  处:《Journal of Semiconductors》索引2021年第42卷第11期,共6页高影响力期刊 基  金:The authors would thank Ping Liang and Ying Hu for their help with device fabrication.This work was supported by the National Key Research and Development Program of China(Grant No.2020YFB0408401);in part by the National Natural Science Foundation of China(Grant Nos.61991430,61774146,61790583,61734006,61835011,61674144,61774150,61805168);in part by Beijing Municipal Science&Technology Commission(Grant No.Z201100004020006);in part by the Key Projects of the Chinese Academy of Sciences(Grant Nos.2018147,YJKYYQ20190002,QYZDJ-SSW-JSC027,XDB43000000,ZDKYYQ20200006). 摘  要:Robust quantum cascade laser(QCL)enduring high temperature continuous-wave(CW)operation is of critical importance for some applications.We report on the realization of lattice-matched InGaAs/InAlAs/InP QCL materials grown by metal-organic chemical vapor deposition(MOCVD).High interface quality structures designed for light emission at 8.5μm are achieved by optimizing and precise controlling of growth conditions.A CW output power of 1.04 W at 288 K was obtained from a 4 mm-long and 10μm-wide coated laser.Corresponding maximum wall-plug efficiency and threshold current density were 7.1%and 1.18 kA/cm2,respectively.The device can operate in CW mode up to 408 K with an output power of 160 mW. 关 键 词:quantum cascade laser metal-organic chemical vapor deposition CONTINUOUS-WAVE interface roughness
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