| 1 | An mm-sized biomimetic directional microphone array for sound source localization in three dimensions显示文摘Fly Ormia ochracea ears have been well-studied and mimicked to achieve subwavelength directional sensing,but their efficacy in sound source localization in three dimensions,utilizing sound from the X-,Y-,and Z-axes,has been less explored.This paper focuses on a mm-sized array of three Ormia ochracea ear-inspired piezoelectric MEMS directional microphones,where their in-plane directionality is considered a cue to demonstrate sound source localization in three dimensions.In the array,biomimetic MEMS directional microphones are positioned in a 120°angular rotation;as a result,six diaphragms out of three directional microphones keep a normal-axis relative to the sound source at six diferent angles in the azimuth plane starting from 0°to 360°in intervals of±30°.In addition,the cosine-dependent horizontal component of the applied sound gives cues for Z-axis directional sensing.The whole array is frst analytically simulated and then experimentally measured in an anechoic chamber.Both results are found to be compliant,and the angular resolution of sound source localization in three dimensions is found to be±2°at the normal axis.The resolution at the azimuth plane is found to be±1.28,and the same array shows a±4.28°resolution when sound is varied from the elevation plane.Looking at the scope within this area combined with the presented results,this work provides a clear understanding of sound source localization in three dimensions. | Ashiqur ahaman Byungki Kim | 2022 | Microsystems & Nanoengineering2022，8，3： | 2 |
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