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| 1 | Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications显示文摘Graphene’s unparalleled strength,chemical stability,ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro-and nanoelectromechanical systems(MEMS and NEMS).However,the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges,including collapse and rupture of the graphene.We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields.We have demonstrated the manufacture of square graphene membranes with side lengths from 7µm to 110µm,and suspended proof masses consisting of solid silicon cubes that are from 5µm×5µm×16.4µm to 100µm×100µm×16.4µm in size.Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies,and the manufacturing yields of the graphene membranes with suspended proof masses were>90%,with>70%of the graphene membranes having>90%graphene area without visible defects.The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz,with quality factors ranging from 63 to 148.The graphene membranes with suspended proof masses were extremely robust,and were able to withstand indentation forces from an atomic force microscope(AFM)tip of up to~7000nN.The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances. | Xuge Fan Anderson D.Smith Fredrik Forsberg Stefan Wagner Stephan Schroder Sayedeh Shirin Afyouni Akbari Andreas C.Fischer Luis Guillermo Villanueva Mikael Ostling Max C.Lemme Frank Niklaus | 2020 | Microsystems & Nanoengineering2020，6，1： | 4 |
| 2 | Inflammatory myofibroblastic tumors显示文摘 | Stephen J.Kovach Anne C.Fischer Philip J.Katzman Rabih M.Salloum Stephen E.Ettinghausen RalphMadeb Leonidas G.Koniaris | 2006 | J Surg Oncol2006，，5： | 1 |
| 3 | Is there a rationale for output-based rebating of environmental levies显示文摘 | Bernard A C.Fischer A.Fox | | 0，，02： | 1 |
| 4 | CORADIA LIREX——创新的轻型区间快速动车组家族显示文摘ALSTOM LHBR公司在LIREX样车的基础上于2001年开发了CORADIA LIREX动车组家族。该动车组整列为低地板、有创新的传动设计以及符合旅客需要的车内布置及设施,为区间铁路运输列车提供了新的标准。模快化结构的车辆是按各种不同传动系统设计的,除牵引电动机外,所有传动部件均安装在车顶上。文章介绍该动车组的基本设计、电气部分、机械部分以及主要技术参数。 | C.Fischer 王渤洪 | 2003 | 变流技术与电力牵引2003，，3： | 0 |
| 5 | Integrating MEMS and ICs显示文摘The majority of microelectromechanical system(MEMS)devices must be combined with integrated circuits(ICs)for operation in larger electronic systems.While MEMS transducers sense or control physical,optical or chemical quantities,ICs typically provide functionalities related to the signals of these transducers,such as analog-to-digital conversion,amplification,filtering and information processing as well as communication between the MEMS transducer and the outside world.Thus,the vast majority of commercial MEMS products,such as accelerometers,gyroscopes and micro-mirror arrays,are integrated and packaged together with ICs.There are a variety of possible methods of integrating and packaging MEMS and IC components,and the technology of choice strongly depends on the device,the field of application and the commercial requirements.In this review paper,traditional as well as innovative and emerging approaches to MEMS and IC integration are reviewed.These include approaches based on the hybrid integration of multiple chips(multi-chip solutions)as well as system-on-chip solutions based on wafer-level monolithic integration and heterogeneous integration techniques.These are important technological building blocks for the‘More-Than-Moore’paradigm described in the International Technology Roadmap for Semiconductors.In this paper,the various approaches are categorized in a coherent manner,their merits are discussed,and suitable application areas and implementations are critically investigated.The implications of the different MEMS and IC integration approaches for packaging,testing and final system costs are reviewed. | Andreas C.Fischer Fredrik Forsberg Martin Lapisa Simon J.Bleiker Göran Stemme Niclas Roxhed Frank Niklaus | 2015 | Microsystems & Nanoengineering2015，1，1： | 0 |
| 6 | 泌尿外科的HIV感染和艾滋病显示文摘虽然HIV感染与艾滋病发病后,主要由内科进行诊断与治疗,但几乎没有一个学科不被涉及到。特别是早期诊断与泌尿外科有关,所以对病程中许多重要症状的认识,在泌尿外科日常工作中往往是很重要的。 | C.Fischer J.Miller M.Gahr R.-H.Ringert 杨为民 | 1995 | 德国医学1995，12，1： | 0 |
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