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| 1 | Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration显示文摘In this paper,a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection.The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator.The working mode stress–frequency theory of a double-ended tuning fork with an enhanced coupling beam is proposed,which is compatible with the simulation and experiment.A unique piezoresistive detection method based on small axially deformed beams with a resonant status is proposed,and other adjacent mode outputs are easily shielded.According to the structure design,high-vacuum wafer-level packaging with different doping in the anodic bonding interface is fabricated to ensure the high quality of the resonator.The pressure sensor chip is fabricated by dry/wet etching,high-temperature silicon bonding,ion implantation,and wafer-level anodic bonding.The results show that the fabricated sensor has a measuring sensitivity of~19 Hz/kPa and a nonlinearity of 0.02%full scale in the pressure range of 0–200 kPa at a full temperature range of−40 to 80°C.The sensor also shows a good quality factor>25,000,which demonstrates the good vacuum performance.Thus,the feasibility of the design is a commendable solution for high-accuracy pressure measurements. | Xiangguang Han Qi Mao Libo Zhao Xuejiao Li Li Wang Ping Yang Dejiang Lu Yonglu Wang Xin Yan Songli Wang Nan Zhu Zhuangde Jiang | 2020 | Microsystems & Nanoengineering2020，6，1： | 4 |
| 2 | Highly efficient quantum dot light-emitting diodes with the utilization of an organic emission layer显示文摘The relative balance of electron and hole injection is crucial for the achievement of highly efficient quantum dot(QD)lightemitting diodes(QLEDs).Here,an inverted red QLED with the utilization of an organic emitting layer(EML)was obtained,exhibiting peak current efficiency(CE)and external quantum efficiency(EQE)of 25.63 cd/A and 23.20%,respectively.In the proposed device,the organic EML,which is a blend of fac-tris(2-phenylpyridine)iridium(Ir(ppy)_(3))and 4,4’-bis(N-carbazolyl)-1,1’-biphenyl(CBP),works as an exciton harvester to capture the leaked electrons from QD layer and the injected holes from hole transporting layer(HTL),then affording energy transfer from organic EML to the adjacent QD layer so that the emission of QD is enhanced significantly.At the same time,according to the results of hole-only and electron-only devices,the insertion of organic EML promotes the hole injection,and eliminates excess electrons from QD to HTL,thus leading to a better match of hole and electron injection in the device.On the basis of the above benefits,the optimal QLED with a 10 nm organic EML offered~2-fold improvements of CE and EQE,respectively,relative to the control device.Furthermore,a better operational lifetime of QLEDs based on the organic EML was achieved. | Yang Li Dejiang Zhao Wei Huang Zhiqiang Jiao Lu Wang Qingyu Huang Peng Wang Mengna Sun Guangcai Yuan | 2023 | Nano Research2023，16，7： | 0 |
| 3 | Deformation mechanism and dynamic precipitation in a Mg-7Al-2Sn alloy processed by surface mechanical attrition treatment显示文摘The effect of second phases on the deformation mechanism of as-cast, solution-treated and aged Mg-7Al-2Sn (AT72) alloys during surface mechanical attrition treatment (SMAT) was investigated. Twinning was suppressed in the alloys containing second phases, which can provide nonuniform microstructures and phase boundaries as dislocation sources. Dynamic precipitation in AT72 alloys was studied during SMAT deformation as well.Mg2Sn particles can dynamically precipitate on the surface of all AT72 alloys during SMAT process. The quantity of Mg2Sn particles in the as-cast alloy, which is determined by the initial quantity of second phases, is larger than that of T4 and T6 alloys after the SMAT process. | Xiaoying Shi Yangxin Li Xiaoqin Zeng Yong Liu Bin Chen Jian Lu Dejiang Li | 2019 | Journal of Materials Science & Technology2019，35，7： | 0 |
| 4 | Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams显示文摘With the increasing demand for multidirectional vibration measurements,traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity,high natural frequency,and low cross-sensitivity simultaneously.Moreover,for piezoresistive accelerometers,achieving pure axial deformation of the piezoresistive beam can greatly improve performance,but it requires the piezoresistive beam to be located in a specific position,which inevitably makes the design more complex and limits the performance improvement.Here,a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed,fabricated,and tested.By controlling synchronous displacements at both piezoresistive beam ends,the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious calculations.The measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity improvement.The pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method(FEM).The triaxial accelerometer was fabricated and tested.Results showing extremely high sensitivities(x axis:2.43 mV/g/5 V;y axis:2.44 mv/g/5 V;z axis:2.41 mV/g/5 V(without amplification by signal conditioning circuit))and high natural frequencies(x/y axes:11.4 kHz;z-axis:13.2 kHz)were obtained.The approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers. | Mingzhi Yu Libo Zhao Shanshan Chen Xiangguang Han Chen Jia Yong Xia Xiaozhang Wang Yonglu Wang Ping Yang Dejiang Lu Zhuangde Jiang | 2023 | Microsystems & Nanoengineering2023，9，1： | 0 |
| 5 | Piezoelectric-AIN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids显示文摘A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters.However,the liquid operating environment poses a challenge to maintaining a fine sensing performance,particularly through electrical characterization.This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes.Multiple modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and seif-sensing capabilities.The focus is on higher flexural resonances,which nonconventionally feature two-dimensional vibration modes.Modal analyses are conducted for the developed cantilever under flexural vibrations at different orders.Modeling explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the cantilever.This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results.Furthermore,the experiments on cantilever resonators are performed in various test liquids,demonstrating that higher-order flexural modes allow for the decoupled measurements of density and viscosity.The measurement differences achieve 0.39%in density and 3.50%in viscosity,and the frequency instability is below 0.05%o.On the basis of these results,design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing. | Linya Huang Wei Li Guoxi Luo Dejiang Lu Libo Zhao Ping Yang Xiaozhang Wang Jiuhong Wang Qijing Lin Zhuangde Jiang | 2022 | Microsystems & Nanoengineering2022，8，2： | 0 |
| 6 | CFD simulation and experiment on the flow field of air-assisted ultra-low-volume sprayers in facilities显示文摘In order to explore the performance of the B-ULV-616A knapsack sprayer,computational fluid dynamics(CFD)was used to simulate the B-ULV-616A knapsack air-assisted device,which features an ultra-low-volume electric sprayer.Field experiments were carried out to test the spraying effects,and the KANOMAX anemometer was used to verify the simulated results.First,the internal and external flow fields and droplet deposition distribution of the ultra-low-volume sprayer were established.The results showed that the air-assisted spray device can change the airflow speed and direction and produce a high-speed swirling airflow at the outlet of the air-assisted spray device.The high-speed airflow(maximum of 83.5 m/s)generates negative pressure(minimum of 0.099 MPa)and causes a rapid increase in the droplet velocity and a secondary droplets spray,allowing droplets to reach a longer distance.Then,the maximum relative error was 20.14%,and its average value was 9.59%,indicating that the CFD method is suitable for the flow field analysis of the air-assisted spray device.Finally,based on the greenhouse experiment,the knapsack air-assisted ultra-low-volume electric sprayer was found to effectively improve the deposition on the rear of the crop,increase the droplet density(maximum of 81/cm2;droplet density of conventional electric sprayer is 64/cm2),and reduce the deposition amount and coefficient of variation(below 20%)within and between regions.Further,it managed to reduce pesticide use(by 69.85%)and rural non-point source pollution. | Xinyu Lu Yan Gong Dejiang Liu Guo Wang Xiao Chen Xiao Zhang Qiuhan Liang | 2021 | International Journal of Agricultural and Biological Engineering2021，14，2： | 0 |
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