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60篇 您的检索式:作者名="Ehrfeld"
    题名 作者 年代 出处 被引量
1A label-free affinity sensor with compensation of unspecific protein interaction by a highly sensitive integrated optical Mach–Zehnder interferometer on silicon显示文摘Franz Brosinger Herbert Freimuth Manfred Lacher Wolfgang Ehrfeld Erk Gedig Andreas Katerkamp Friedrich Spener Karl Cammann 1997Sensors & Actuators: B Chemical1997,,1:1
2Electrochemistry and Microsystems显示文摘W G Ehrfeld 0,,20:1
3Microsystern technology: between research and industrial application显示文摘 EHRFELD W HESSEL V 1998Microelectronic Engineering1998,4142,:1
4Micro electro discharge machining as a technology in micromachining 显示文摘Ehrfeld W 1996Proceedings of the SPIE-The International Society for Optical Engineering1996,,2879:1
5Characterization of mixing in micromixers by a test reaction: single mixing units and mixer arrays显示文摘Ehrfeld W Golbig K Hessel V 1999Ind Eng Chem Res1999,,38:1
6Cements: a new medium for micro-engineering structures?显示文摘S. L. Colston P. Barnes H. Freimuth M. Lacher W. Ehrfeld 1996Journal of Materials Science Letters1996,,19:1
7Electrochemistry and Microsysterms显示文摘Ehrfeld W 2003Elec- trochimica Acta2003,48,2022:1
8Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography,galvanoforming,and plastic moulding (LIGA process)显示文摘BECKER E W EHRFELD W HAGMANN P 1986Microelectronic Engineering1986,4,1:1
9Electrochemistry and microsystems 显示文摘Ehrfeld Wolfang 2003Electrochemica Acta2003,48,202122:1
10Fabrication technologies for microsystems utilizing photoetchable glass显示文摘DIETRICH T R EHRFELD W LACHER M 1996Microelectronic Engineering1996,30,4:1
11Combinat ion of Excimer Laser Micro marching and Replication Processes Suited for Large Scale Product ion 显示文摘A rnold J Ehrfeld Dasbach W Hesch K 1995App lied Surface Science1995,86,:1
12Electrochemistry and microsystems显示文摘EHRFELD W 2003Electrochimica Acta2003,48,202122:1
13Electrochemistry and microsystems显示文摘Ehrfeld W 2003Electrochim Acta2003,48,20222:1
14Progress in deep-etch synchrotron radiation lithography显示文摘W Ehrfeld P Bley F Gotz 1988J Vac Sci Technol1988,6,1:1
15Fabrication of microstructures with high aspect retios and great structural heights by synchrotron radiation lithography galvanofoming and plastic moulding(LIGA process)显示文摘Becker E W Ehrfeld W Hagmann P 1986Microelectronic Engineering1986,,4:1
16Fabrication Technologies for Microsystems Utilizing Photoetchable Glass显示文摘Dietrich T R Ehrfeld W Lacher M 1996Microelectronic Engineering1996,30,:1
17Electrochemistry and Microsystems显示文摘Ehrfeld W 2003Electro- chimica Acta2003,48,2022:1
18Material of LIGA technology 显示文摘EHRFELD W HESSEL V LOWE H 1999Microsystems Technologies1999,5,3:1
19Design and relization of a penny- shaped micromotor显示文摘M Nienhaus W Ehrfeld F Michel 1999SPIE1999,3680,:1
20Fabrication of microstructures with high aspect rations and great structural heights by synchrotron radiation lithography,galvanoforming,and plastic molding (LIGA process)显示文摘BECKER E W EHRFELD W HAGMANN P 1986Microelectronic Engineering1986,,4:1
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