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1篇 您的检索式：作者名="Gregor PRIMC"

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		题名	作者	年代	出处	被引量
	1	Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber显示文摘The characteristics of an innovative configuration of multiple radiofrequency(RF)coils immersed in a large metallic chamber are presented.Water-cooled copper coils were mounted within the slits of double-walled glass tubes,which were immersed into a stainless-steel chamber.The coils were connected in parallel to a gamma-type matching network,powered by an RF generator operating at industrial frequency.Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils.Transitions from E-to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa.A uniform plasma was sustained in H-mode at the absorbed power threshold,which increased monotonously with increasing pressure in the metallic chamber.All coils exhibit the same E-to H-mode transition hysteresis and need the same amount of power for transitioning from E-to H-mode.The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.	Dane LOJEN Rok ZAPLOTNIK Miran MOZETIC Alenka VESEL Gregor PRIMC	2022	Plasma Science and Technology2022，24，1：	0

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