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| 1 | Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers显示文摘MEMS-based micro speakers are attractive candidates as sound transducers for smart devices,particularly wearables and hearables.For such devices,high sound pressure levels,low harmonic distortion and low power consumption are required for industrial,consumer and medical applications.The ability to integrate with microelectronic circuitry,as well as scalable batch production to enable low unit costs,are the key factors benchmarking a technology.The Nanoscopic Electrostatic Drive based,novel micro speaker concept presented in this work essentially comprises inplane,electrostatic bending actuators,and uses the chip volume rather than the its surface for sound generation.We describe the principle,design,fabrication,and first characterization results.Various design options and governing equations are given and discussed.In a standard acoustical test setup(ear simulator),a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%,thus proving the concept.Further potential on sound pressure as well as linearity improvement is outlined.We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. | Bert Kaiser Sergiu Langa Lutz Ehrig Michael Stolz Hermann Schenk Holger Conrad Harald Schenk Klaus Schimmanz David Schuffenhauer | 2019 | Microsystems & Nanoengineering2019，5，1： | 2 |
| 2 | The rising tide of dementia worldwide显示文摘 | Larson E Langa K | | 0，，9637： | 1 |
| 3 | Mixed dementia:emerging concepts and therapeutic implications显示文摘 | Langa KM Foster NL Larson EB | | 0，，： | 1 |
| 4 | Prevalence of cognitive impairment without dementia in the United States显示文摘 | Plassman BL Langa KM Fisher GG | 2008 | Ann Intern Med2008，148，： | 1 |
| 5 | On the upper semicontinuity of cocyle atlractom for non-autonomous and random dynamical systems显示文摘 | Caraballo T Langa J A | 2003 | Dynamics of Continuous Discrete and Impulsive Systems Series A : Mathematical Analysis2003，10，4： | 1 |
| 6 | Supercritical fluid ex- traction of Spanish sage essential oil: optimization of the process parameters and modelling显示文摘 | E Langa G Delia Porta A M F Palavra | 2009 | J Supercr Fluids2009，49，： | 1 |
| 7 | Prevalence of dementia in the United States:the aging,demographics,and memory study显示文摘 | Plassman BL Langa KM Fisher GG Heeringa SG Weir DR Ofstedal MB Burke JR Hurd MD Potter GG Rodgers WL Sreffens DC Willis RJ Wallace RB | | 0，，： | 1 |
| 8 | Human milk is a source of lactic acid bacteria for the infant gut 显示文摘 | Martin R Langa S Reviriego C | 2003 | J Pediatr2003，143，： | 1 |
| 9 | On the ulyper semicontinuity of attractors for small random perturbations of dynamical systems显示文摘 | Caraballo T Langa J A Robinson J C | 1998 | Communicatiort in PDEs1998，23，910： | 1 |
| 10 | Prevalence of depression among older Americans: the aging, demographics and memory, study 显示文摘 | STEFFENS D C FISHER G G LANGA K M | 2009 | Int Psychogeriatr2009，21，5： | 1 |
| 11 | Expression of endoglin in human mesangial cells:modulation of extracellular matrix synthesis 显示文摘 | Diez-Marques L Ortega-Velazquez R Langa C | 2002 | Biochim B iophys Acta2002，1587，1： | 1 |
| 12 | Induction of myocardial insulinlike growth factor 1 gene expression in left ventricular hypertrophy 显示文摘 | Donohue TJ Dwotkin LD Langa MN | 1994 | Circulation1994，89，2： | 1 |
| 13 | Studies on the density,heat capacity,surface tension and infinite dilution diffu-sion with the ionic liquids , , and 显示文摘 | de CASTRO C A N LANGA E MORAIS A L | 2010 | Fluid Phase Equilibria2010，294，12： | 1 |
| 14 | Preva- lence of cognitive impairment without dementia in the Unit- ed States显示文摘 | PLASSMAN BL LANGA KM FISHER GG | 2008 | Ann Intern Med2008，148，6： | 1 |
| 15 | Expression of endoglin in human mesangial cells:modulation of extrascellular matrix synthesis显示文摘 | Luisa Diez-Marques Rocio Ortega-Velazquez Carmen Langa | 2002 | Biochimica et Biophysica Acta2002，1587，： | 1 |
| 16 | Projected costs of ischemic stroke in the United States显示文摘 | Brown DL Boden-Albala B Langa KM | 2006 | Neurology2006，67，8： | 1 |
| 17 | A geometric algorithm for overeomplete linear ICA显示文摘 | Theis F J Langa E W Puntonet C G | 2004 | Neurocomputing2004，56，： | 1 |
| 18 | Expression of endoglin in human mesangial cells:modulation of extracelular matrix synthesis显示文摘 | Diez-Marques L Ortega-Velazquez R Langa C | 2002 | Biochim Biophys Acta2002，1587，1： | 1 |
| 19 | Vitamin D and risk of cognitive decline in elderly persons 显示文摘 | Llewellyn D J Lang IA Langa KM | 2010 | Arch Intern Med2010，170，13： | 1 |
| 20 | The association of cognitive function and social support with glycemic control in adults with diabetes显示文摘 | Okura T Heisler M Langa KM | 2009 | J Am Geriatr Soc2009，57，10： | 1 |
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