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21篇 您的检索式：作者名="THAKURTA D G"

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	题名	作者	年代	出处	被引量
1	Two-Dimensional Water-Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport 显示文摘	SUNDARARAJAN S THAKURTA D G SCHWENDEMAN D W	1999	J Electrochem Soc1999，146，2：	1
2	Two-Dimensional Wafer-Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport显示文摘	SUNDARARAJAN S THAKURTA D G SCHWENDEMAN D W	1999	J Electrochem Soc1999，146，2：	1
3	Thermophoretic deposition of small particles in a direct numerical simulation of turbulent channel flow显示文摘	THAKURTA D G CHEN M MCLAUGHLIN J B	1998	Hear and MassTransfer1998，41，24：	1
4	Two-dimensional waferscale chemical mechanical planarization models based on lubrication theory and mass transport显示文摘	SUNDARARAJAN S THAKURTA D G SCHWENDEMAN D W	1999	Journal of the electrochemical society1999，146，2：	1
5	Two-Dimensional Wafer-Scale Chemical-Mechanical Planarization Models Based on Lubrication Theory and Mass Transport 显示文摘	Sundararajan S Thakurta D G	1999	Journal of the Electrochemical Society1999，146，2：	1
6	A feature scale model for chemical mechanical planarization of damascene structures显示文摘	SAXENA R THAKURTA D G GUTMANN R J	2004	Thin Solid Films2004，449，12：	1
7	Thermophoretic deposition of small particles in a direct numerical simulation of turbulent channel flow显示文摘	Thakurta D G Chen M McLaughlin J B	1998	Hear and Mass Transfer1998，41，24：	1
8	Two- dimensional wafer-scale chemical mechanical planarizatinn models based on lubrication lheory and mass transport 显示文摘	Sundararajan S Thakurta D G Schwendeman D W	1999	Journal of the Electrochemical Society1999，146，2：	1
9	Two-dimensional wafer-scale mechanical planarization model based on lubrication theory and mass transport显示文摘	Sundararajan S Thakurta G D Schwendendemun D W	1999	Journal of the Electrochemical Society1999，46，2：	1
10	Two-dimensional wafer-scale chemical - mechanical planarization models based on lubrication theory and mass transport 显示文摘	Sundararajan S Thakurta D G	1999	J Electrochemical Society1999，146，2：	1
11	Ther- mophoretic deposition of small particles in a direct numeri- cal simulation of turbulent channd flow显示文摘	Thakurta D G Chen M McLaughlin J B	1998	Hear and Mass Transfer1998，41，24：	1
12	Three-dimensional chemical mechanical planarization slurry flow model based on lubrication theory显示文摘	Thakurta D G Borst C L Schwendeman D W	2001	J Ele-ctrochem Soc2001，148，4：	1
13	Two-dimensional wafer-scale mechanical planarization model based on lubrication theory and mass transport 显示文摘	Sundararajan S Thakurta G D Schwendeman D W el al	1999	J Electrochem Soc1999，146，2：	1
14	Pad porosity compressibility and slurry delivery effects in chemical-mechanical planarization: Modeling and experiment 显示文摘	Thakurta D G Borst C L Schwendeman D W	2000	Thin Solid Films2000，366，：	1
15	Three- dimensional chemical mechanical planarization slurry flow model based on lubrication theory 显示文摘	Thakurta D G Borst C L Schwendeman D W	2001	J Electrochem Soc2001，148，4：	1
16	Two- dimensional wafer-scale mechanical planarization model based on lubrication theory and mass transport 显示文摘	Sundararajan S Thakurta G D Schwendeman D W	1999	Journal of the Electrochemical Society1999，46，2：	1
17	Thermophoretic Deposition of Small Particles in a Direct Numerical Simulation of Turbulent Channel Flow 显示文摘	Thakurta D G Chen M McLaughlin J B	1998	Hear and Mass Transfer1998，41，24：	1
18	Chemical Mechanical Polishing Mechanisms of Low Dielectric Constant Polymers in Copper Slurries显示文摘	Borst C L Thakurta D G Gill W N		0，，11：	1
19	Two-dimensional wafer-scale chemical mechanical planarization models based on lubrication theory and mass transport 显示文摘	Sundararajan S Thakurta D G Schwendeman D W	1999	Journal of the Electrochemical Society1999，146，2：	1
20	Two-dimensional wafer-scale chemical-mechanical planarizationmodels based on lubrication theory and mass transport 显示文摘	Sundararajan S Thakurta D G Schwendeman D W	1999	Journal of the Electrochemical Society1999，146，2：	1

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