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		题名	作者	年代	出处	被引量
	1	Estimation of asymptotic variances of quantiles for the generalized logistic distribution显示文摘	Shin Hongjoon Kim Taesoon Kim Sooyoung	2010	Stoch Environ Res Risk Assess2010，24，：	1
	2	Electrical resistivity evolution in electrodeposited Ru and Ru-Co nanowires显示文摘Nanoscale ruthenium(Ru)-based materials are promising replacements for existing multilayered Cu interconnects in integrated circuits.However,it is not easy to apply the results of previously reported studies directly to the electrochemical damascene process because the previous studies have mainly focused on thin flms by dry deposition.Here,we report the electrical resistivity and microstructure of electrodeposited Ru nanowires.We estimate that the resistivity value of a 10 nm diameter Ru nanowire to be71.6μΩcm after analyzing the resistivity values of individual nanowires with various diameters.Furthermore,we investigate the electrical properties of Ru_(x)Co_(1-x)nanowires where x is 0.04–0.99 at.%as possible replacements of the current Ta N barrier structures.Over the entire composition range,the resistivity values of alloys are much lower than that of the conventional Ta N.Additionally,Ru and Ru-alloy nanowires surrounded by dielectric silica are thermally stable after 450°C heat treatment.Therefore,the nanoscale Ru and Ru-Co alloys possessing low resistivity values can be candidates for the interconnect and barrier materials,respectively.	Jun Hwan Moon Seunghyun Kim Taesoon Kim Yoo Sang Jeon Yanghee Kim Jae-Pyoung Ahn Young Keun Kim	2022	Journal of Materials Science & Technology2022，，10：	0

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