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| 1 | A review of silicon-based wafer bonding processes,an approach to realize the monolithic integration of Si-CMOS and III-V-on-Si wafers显示文摘The heterogeneous integration of III-V devices with Si-CMOS on a common Si platform has shown great promise in the new generations of electrical and optical systems for novel applications,such as HEMT or LED with integrated control circuitry.For heterogeneous integration,direct wafer bonding(DWB)techniques can overcome the materials and thermal mismatch issues by directly bonding dissimilar materials systems and device structures together.In addition,DWB can perform at wafer-level,which eases the requirements for integration alignment and increases the scalability for volume production.In this paper,a brief review of the different bonding technologies is discussed.After that,three main DWB techniques of single-,double-and multi-bonding are presented with the demonstrations of various heterogeneous integration applications.Meanwhile,the integration challenges,such as micro-defects,surface roughness and bonding yield are discussed in detail. | Shuyu Bao Yue Wang Khaw Lina Li Zhang Bing Wang Wardhana Aji Sasangka Kenneth Eng Kian Lee Soo Jin Chua Jurgen Michel Eugene Fitzgerald Chuan Seng Tan Kwang Hong Lee | 2021 | Journal of Semiconductors2021，42，2： | 5 |
| 2 | Recurrent aphthous stomatitis caused by food allergy显示文摘 | Wardhana Datan EA | 2010 | Acta Med Indones2010，42，4： | 1 |
| 3 | Analysis of recent bridge failure in the United States 显示文摘 | Wardhana K Hadipriono F C | 2003 | Journal of Performance of Constructed Facilities ASCE2003，17，3： | 1 |
| 4 | Analysis of Recent Bridge Failure in the United States 显示文摘 | WARDHANA K HADIPRIONO F C | 2003 | Jour- nal of Performance of Constructed Facilities2003，17，3： | 1 |
| 5 | Analysis of Recent Bridges Failures in the United States显示文摘 | Kumalasari Wardhana Fahian C Hadipriono | 2003 | Journal of Performance of Constructed Facilities2003，，8： | 1 |
| 6 | Analysis of recent bridge failures in the United States显示文摘 | Wardhana K Hadipriono F C | 2003 | Journal of Performance of Constructed Facilities2003，17，3： | 1 |
| 7 | Recurrent aphthous stomatitis caused by food allergy显示文摘 | Wardhana Datau EA | 2010 | Acta Med Indones2010，42，4： | 1 |
| 8 | Hadiprionol Analysis of Recent Bridges Failures in the United States 显示文摘 | Kumalasari Wardhana Fahian C | 2003 | Journal of Performance of Constructed Facilities2003，，8： | 1 |
| 9 | Efficacy of nigella sativa on serum free testosterone and metabolic dis- turbances in central obese male 显示文摘 | Datau EA Wardhana Surachmanto EE | 2010 | Acta Med Indones2010，42，3： | 1 |
| 10 | Pkstpartum thyroiditis显示文摘 | Lazarus JH Parkes AB Peema wardhana LD | 2002 | Autoimmunity2002，35，3： | 1 |
| 11 | Nosocomial infection in bumunit of cipto mangunkusumo hospital, Jakarta显示文摘 | Mahandaru D Wardhana A | 2012 | JumalPlastikRekonstruksi2012，1，3： | 1 |
| 12 | Analysis of recent bridge failures in the United States显示文摘 | WARDHANA K FABIAN C HADIPRIONO P E | 2003 | Journal of Performance of Constructed Facilities2003，17，3： | 1 |
| 13 | Analysis of recent bridges failure in the United States 显示文摘 | WARDHANA K HADIPRIONO F C | 2003 | Journal of Perfolnance of Constructed Facilities2003，，8： | 1 |
| 14 | Efficacy of nigella sativa on serum free testosterone and metabolic disturbances in central obese male显示文摘 | Datau EA Wardhana Surachmanto EE | 2010 | Acta Med Indones2010，42，3： | 1 |
| 15 | Analysis of Recent Bridge Failures in the United States 显示文摘 | Wardhana K Hadipriono FC | 2003 | Journal Of Performance of Constructed Facilities2003，17，3： | 1 |
| 16 | The Role of omega-3 fatty acids contained in olive oil on chronic inflammation 显示文摘 | WARDHANA SURACHMANTO E E DATAU E A | 2011 | Acta Med Indones- Indones J Int Med2011，43，： | 1 |
| 17 | Recurrent aphthous stomatitis caused by food allergy显示文摘 | Wardhana Datau EA | 2010 | Acta Med Indones2010，42，4： | 1 |
| 18 | Analysis of recent bridge failares in the united states显示文摘 | Kumalasari Wardhana FabianC Hadipriono | 2003 | Journal of Performance of Constructed Facilities2003，，： | 1 |
| 19 | Allogenic hemato-poietic stem cell as curative treatment in myelofibrosis 显示文摘 | Wardhana Datau E A Rotty L W | 2011 | Acta Med Indones2011，43，4： | 1 |
| 20 | Analysis of recent bridge failures in the United States显示文摘 | Kumalasari Wardhana Fabian C Hadipriono | 2003 | ASCE Journal of Constructed Facilities2003，17，3： | 1 |
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