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您的检索式：作者名="Zhi‑Di Lei"
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| 1 | Latest developments in EUV photoresist evaluation capability at Shanghai Synchrotron Radiation Facility显示文摘Evaluating the comprehensive characteristics of extreme ultraviolet(EUV)photoresists is crucial for their application in EUV lithography,a key process in modern technology.This paper highlights the capabilities of the Shanghai Synchrotron Radiation Facility(SSRF)08U1B beamline in advancing this field.Specifically,it demonstrates how this beamline can create fringe patterns with a 15-nm half-pitch on a resist using synchrotron-based EUV lithography.This achievement is vital for evaluating EUV photoresists at the advanced 5-nm node.We provide a detailed introduction to the methods and experimental setup used at the SSRF 08U1B beamline to assess an EUV photoresist.A significant part of this research involved the fabrication of high-resolution hydrogen silsesquioxane mask gratings.These gratings,with an aspect ratio of approximately 3,were created using electron beam lithography on an innovative mask framework.This framework was crucial in eliminating the impact of zeroth-order light on interference patterns.The proposed framework propose offers a new approach to mask fabrication,particularly beneficial for achromatic Talbot lithography and multicoherent-beam interference applications. | Zhen‑Jiang Li Cheng‑Hang Qi Bei‑Ning Li Shu‑Min Yang Jun Zhao Zhi‑Di Lei Shi‑Jie Zhu Hao Shi Lu Wang Yan‑Qing Wu Ren‑Zhong Tai | 2023 | Nuclear Science and Techniques2023，34，12： | 0 |
| 2 | The MING proposal at SHINE:megahertz cavity enhanced X‑ray generation显示文摘The cavity-based X-ray free-electron laser(XFEL)has promise in producing fully coherent pulses with a bandwidth of a few meV and very stable intensity,whereas the currently existing self-amplified spontaneous emission(SASE)XFEL is capable of generating ultra-short pulses with chaotic spectra.In general,a cavity-based XFEL can provide a spectral brightness three orders of magnitude higher than that of the SASE mode,thereby opening a new door for cutting-edge scientific research.With the development of superconducting MHz repetition-rate XFEL facilities such as FLASH,European-XFEL,LCLS-II,and SHINE,practical cavity-based XFEL operations are becoming increasingly achievable.In this study,megahertz cavity enhanced X-ray generation(MING)is proposed based on China’s first hard XFEL facility-SHINE,which we refer to as MING@SHINE. | Nan‑Shun Huang Zi‑Peng Liu Bang‑Jie Deng Zi‑Han Zhu Shao‑Hua Li Tao Liu Zheng Qi Jia‑Wei Yan Wei Zhang Sheng‑Wang Xiang Yang‑Yang Lei Ya Zhu Yong‑Zhou He Qi‑Bing Yuan Fei Gao Rong‑Bing Deng Sen Sun Zhi‑Di Lei Zhi‑Qiang Jiang Meng‑Qi Duan Yuan Zhuan Xue‑Fang Huang Peng‑Cheng Dong Zhong‑Liang Li Shang‑Yu Si Lian Xue Si Chen Yong‑Fang Liu Ya‑Jun Tong Hai‑Xiao Deng Zhen‑Tang Zhao | 2023 | Nuclear Science and Techniques2023，34，1： | 2 |
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