Scalable and ultrafast epitaxial growth of single-crystal graphene wafers for electrically tunable liquid-crystal microlens arrays

查看全文 作　　者：Bing [1]Deng;Zhaowei [2]Xin;Ruiwen [3]Xue;Shishu [1]Zhang;Xiaozhi [4]Xu;Jing [5]Gao;Jilin [1,5]Tang;Yue [1,6]Qi;Yani [1]Wang;Yan [1,6]Zhao;Luzhao [1,6]Sun;Huihui [1]Wang;Kaihui [4]Liu;Mark H. [7,8]Rummeli;Lu-Tao [3]Weng;Zhengtang [3]Luo;Lianming [1]Tong;Xinyu [2]Zhang;Changsheng [9]Xie;Zhongfan [1,10]Liu;Hailin [1,10]Peng

机构地区：[1]Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences (BNLMS), College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China;[10]Beijing Graphene Institute (BCl), Beijing 100094, China;[2]Wuhan National Laboratory for Optoelectronics, School of Automation, National Key Laboratory of Science and Technology on Multispectral Information Processing, Huazhong University of Science & Technology, Wuhan 430074, China;[3]Department of Chemical and Biological Engineering, Materials Characterization and Preparation Facility, The Hong Kong University of Science and Technology, Hong Kong 999077, China;[4]State Key Laboratory for Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China;[5]Institute of Functional Nano and Soft Materials (FUNSOM), J iangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou 215123, China;[6]Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China;[7]Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, College of Energy, Soochow Institute for Energy and Materials Innovations, Soochow University, Suzhou 215006, China;[8]Centre of Polymer and Carbon Materials, Polish Academy of Sciences, Zabrze 41-819, Poland;[9]Wuhan National Laboratory for Optoelectronics, Huazhong University of Science & Technology, Wuhan 430074, China

出　　处：《Science Bulletin》索引2019年第64卷第10期,共10页

基　　金：supported by the National Basic Research Program of China(2016YFA0200101 and 2014CB932500);the National Natural Science Foundation of China(21525310,51432002,51520105003,61432007,and 61176052);Beijing Municipal Science&Technology Commission(Z161100002116021 and Z181100004818001) 摘　　要：The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoelectronics. Here, ultrafast epitaxial growth of single-crystal graphene wafers is realized on singlecrystal Cu90Ni10(1 1 1) thin films fabricated by a tailored two-step magnetron sputtering and recrystallization process. The minor nickel(Ni) content greatly enhances the catalytic activity of Cu, rendering the growth of a 4 in. single-crystal monolayer graphene wafer in 10 min on Cu90Ni10(1 1 1), 50 folds faster than graphene growth on Cu(1 1 1). Through the carbon isotope labeling experiments, graphene growth on Cu90Ni10(1 1 1) is proved to be exclusively surface-reaction dominated, which is ascribed to the Cu surface enrichment in the Cu Ni alloy, as indicated by element in-depth profile. One of the best benefits of our protocol is the compatibility with wafer process and excellent scalability. A pilot-scale chemical vapor deposition(CVD) system is designed and built for the mass production of single-crystal graphene wafers, with productivity of 25 pieces in one process cycle. Furthermore, we demonstrate the application of single-crystal graphene in electrically controlled liquid-crystal microlens arrays(LCMLA), which exhibit highly tunable focal lengths near 2 mm under small driving voltages. By integration of the graphene based LCMLA and a CMOS sensor, a prototype camera is proposed that is available for simultaneous light-field and light intensity imaging. The single-crystal graphene wafers could hold great promising for highperformance electronics and optoelectronics that are compatible with wafer process. 关键词：GRAPHENE ULTRAFAST growth CuNi(1 1 1)thin film Single CRYSTAL wafer Liquid CRYSTAL MICROLENS arrays

相关文献

参考文献（66）
引证文献（9）
耦合文献（55）

参考文献(66)

引证文献(9)

耦合文献(55)

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费

Scalable and ultrafast epitaxial growth of single-crystal graphene wafers for electrically tunable liquid-crystal microlens arrays

参考文献(66)

引证文献(9)

耦合文献(55)

用户提示