Ultra-sharp silicon multimode waveguide bends based on double free-form curves

查看全文 作　　者：SHANGSEN [1]SUN;ZHIQIANG [2]YANG;JUANLI [1]WANG;RUNSEN [1]ZHANG;FENGCHUN [1]ZHANG;NING [1]ZHU;LEI [3]WAN;ZHAOHUI [2,4]LI

机构地区：[1]Institute of Semiconductor Science and Technology,Guangdong Engineering Technology Research Center of Low Carbon and New Energy Materials,South China Normal University,Guangzhou 510631,China;[2]Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems,Key Laboratory of Optoelectronic Materials and Technologies,School of Electrical and Information Technology,Sun Yat-sen University,Guangzhou 510275,China;[3]Department of Electronic Engineering,College of Information Science and Technology,Jinan University,Guangzhou 510632,China;[4]Southern Marine Science and Engineering Guangdong Laboratory(Zhuhai),Zhuhai 519000,China

出　　处：《Photonics Research》索引2022年第10卷第6期,共7页

基　　金：Key Project in Broadband Communication and New Network of the Ministry of Science and Technology(MOST)(2019YFB1803904);National Natural Science Foundation of China(61805104,62175095,U2001601);Natural Science Foundation of Guangdong Province(2020A1515010786);Science Foundation of Guangzhou City(202102020593);China Postdoctoral Science Foundation(2021M693599)。 摘　　要：Mode-division multiplexing(MDM)can greatly improve the capacity of information transmission.The multimode waveguide bend(MWB)with small size and high performance is of great significance for the on-chip MDM integrated system.In this paper,an MWB with high performance based on double free-form curves(DFFCs)is proposed and realized.The DFFC is a combination of a series of arcs optimized by the inverse design method.The fabrication of this MWB only needs one-step lithography and plasma etching and has a large fabrication tolerance.MWBs with effective radii of 6μm and 10μm are designed to support three modes and four modes,respectively.The proposed method gives the best overall performance considering both the effective bending radius and the transmission efficiency.The fabricated MWB with four mode channels has low excess losses and crosstalks below-21 dB in the wavelength range from 1520 to 1580 nm.It is expected that this design can play an important role in promoting the dense integration of multimode transmission systems. 关键词：WAVEGUIDE MULTIMODE LITHOGRAPHY

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Ultra-sharp silicon multimode waveguide bends based on double free-form curves

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