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| 1 | Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes:Breaking the barrier toward high-performance monolithic inertial measurement units显示文摘This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs). | Haoran Wen Anosh Daruwalla Farrokh Ayazi | 2017 | Microsystems & Nanoengineering2017，3，1： | 4 |
| 2 | Substrate-decoupled,bulk-acoustic wave gyroscopes:Design and evaluation of next-generation environmentally robust devices显示文摘This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave(BAW)vibratory gyro from its substrate,minimizing the effect that external sources of error have on the offset and scale factor of the device.Substrate-decoupled(SD)BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60000 were implemented using the high aspect ratio poly and single-crystal silicon(HARPSS)process to achieve ultra-narrow capacitive gaps.Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit(ASIC)to achieve low variations in the offset across temperature(±26°s^(−1) from−40 to 85℃),supreme random-vibration immunity(0.012°s^(−1) gRMS−1)and excellent shock rejection.With a scale factor of 800μV(°s^(−1))^(−1),the SD-BAW gyro system attains a large full-scale range(±1250°s^(−1))with a non-linearity of less than 0.07%.A measured angle-random walk(ARW)of 0.39°/√h and a bias instability of 10.5°h^(−1) are dominated by the thermal and flicker noise of the integrated circuit(IC),respectively.Additional measurements using external electronics show bias-instability values as low as 3.5°h−1,which are limited by feed-through signals coupled from the drive loop to the sense channel,which can be further reduced through proper re-routing of the gyroscope pin-out configuration. | Diego E.Serrano Mohammad F.Zaman Amir Rahafrooz Peter Hrudey Ron Lipka Duane Younkin Shin Nagpal Ijaz Jafri Farrokh Ayazi | 2016 | Microsystems & Nanoengineering2016，2，1： | 3 |
| 3 | Process and temperature compensation in a 7-MHz CMOS clock osctllator显示文摘 | Sundaresan K Allen P E Ayazi F | | 0，，02： | 1 |
| 4 | Comparison of serum IL lbeta and C reactive protein levels in early diagnosis and management of neonatal sepsis 显示文摘 | Ayazi P Mahyar A Daneshi MM | 2014 | Infez Med2014，22，4： | 1 |
| 5 | Process and temperature compensation in a 7 MHz CMOS clock oscillator显示文摘 | Krishnakumar Sundaresan Phillip E Allen Farrokh Ayazi | | 0，，02： | 1 |
| 6 | Comparing of letrozole versus clomiphene citrate combined with gonadotropins in intrauterine insemination cycles显示文摘 | Akbari S Ayazi Roozbahani M Ayazi Roozbahani F | 2012 | Iran J Reprod Med2012，10，1： | 1 |
| 7 | Micromachined inertial sensors显示文摘 | Yazdi N Ayazi F Najafi K | | 0，，08： | 1 |
| 8 | Minimiza- tion of needle deflection in robot-assisted percutaneous therapy显示文摘 | ABOLHASSANI N PATEL R V AYAZI F | 2007 | The International Journal of Medical Robot- ics and Computer Assisted Surgery2007，3，2： | 1 |
| 9 | The val- ue of high-resolution manometry in the assessment of the resting characteristics of the lower esophageal sphincter显示文摘 | AYAZI S HAGEN J A ZEHETNER J | 2009 | J Gastrointest Surg2009，13，： | 1 |
| 10 | Micromachined inertial sensors显示文摘 | Yazdi N Ayazi F Najafi K | 1998 | Proc IEEE1998，86，： | 1 |
| 11 | All-die- lectric photonic-assisted radio front-end technology 显示文摘 | Hsu R C J Ayazi A Houshmand B | 2007 | NaturePhotonics2007，1，9： | 1 |
| 12 | Endometrial local injury improves the pregnancy rate among recurrent implantation failure patients undergoing in vitro fertilisation/intra cy- toplasmic sperm injection:A randomised clinical trial显示文摘 | Karimzadeh MA Ayazi Rozbahani M Tabibnejad N | 2009 | Aust N Z J Obstet Gynaecol2009，49，6： | 1 |
| 13 | Endometrial local injury improves the pregnancy rate among recurrent implantation failure patients undergoing in vitro fertilisation/intracytoplasmic sperm injection:a randomised clinical trial显示文摘 | Karimzadeh MA Ayazi Rozbahani M Tabibnejad N | 2009 | Aust N Z J Obstet Gynaecol2009，49，： | 1 |
| 14 | High aspect-ratio combined poly and single-crystal silicon(HARPSS)MEMS technology显示文摘 | AYAZI F NAJAFI K | 2000 | J Microelectromechanical Systems2000，9，3： | 1 |
| 15 | A novel needle trap sor- bent based on carbon nanotube-sol-gel for micro-extrac- tion of polycyclic aromatic hydrocarbons from aquatic me- dia显示文摘 | Bagheri H Ayazi Z Aghakhani A | 2011 | Analytica Chimica Acta2011，683，2： | 1 |
| 16 | High aspect-ratio polysilicon micromachining technology显示文摘 | AYAZI F NAJAFI K | 2000 | Sensors and Actuators2000，87，12： | 1 |
| 17 | Process and tem-perature compensation in 7-MHz CMOS clock oscilla-tor显示文摘 | Sundaresan K Allen P E Ayazi F | 2006 | IEEE Journal of Solid-State Circuits2006，41，2： | 1 |
| 18 | Obesity and Gastroesophageal Reflux: Quantifying the Association Between Body Mass Index, Esophageal Acid Exposure, and Lower Esophageal Sphincter Status in a Large Series of Patients with Reflux Symptoms显示文摘 | Shahin Ayazi Jeffrey A. Hagen Linda S. Chan Steven R. DeMeester Molly W. Lin Ali Ayazi Jessica M. Leers Arzu Oezcelik Farzaneh Banki John C. Lipham Tom R. DeMeester Peter F. Crookes | 2009 | Journal of Gastrointestinal Surgery2009，，8： | 1 |
| 19 | Micromachined inertial sensors 显示文摘 | YAZDI N AYAZI F NAJAFI K | 1998 | Proceedings of the IEEE1998，86，8： | 1 |
| 20 | Hydrodynamics of secondary nucleation in suspension crystallization显示文摘 | Ayazi Shamlou P Jones A G Djamarani K | 1990 | Chemical Engineering Science1990，45，5： | 1 |
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