| 1 | Challenges and strategies in high-accuracy manufacturing of the world’s largest SiC aspheric mirror显示文摘In the process of manufacturing the world’s largest silicon carbide(SiC)aspheric mirror,the primary difficulties are mirror blank preparation,asphere fabrication,and testing,as well as cladding and coating.Specifically,the challenges include the homogeneity of the complicated structure casting,accuracy and efficiency of the fabrication process,print-through effect,fidelity and precision of test procedure,stress and denseness of cladding process,the dynamic range of interferometric measurement,and air turbulence error due to the long optical path.To break through such a barrier of difficulties,we proposed the water-soluble room temperature vanishing mold and gel casting technology,homogeneous microstructure reaction-formed joint technology,nano-accuracy efficient compound fabrication,gravity unloading technology,high-denseness low-defect physical vapor deposition(PVD)Si-cladding technology,test data fusion method,and time-domain averaging method,etc.Based on the proposed technologies and methods,we have accomplished the world’s largest SiC aspheric mirror with a size of φ4.03 m.The impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric mirror.The aerial density of the SiC blank is less than 120 kg/m^(2),surface shape test accuracy is better than 6 nm RMS,thickness inhomogeneity of the cladding layer is less than 5%,and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS,respectively. | Xuejun Zhang Haixiang Hu Xiaokun Wang Xiao Luo Ge Zhang Wenxing Zhao Xiaoyi Wang Zhenyu Liu Ling Xiong Erhui Qi Congcong Cui Yanchao Wang Yingjie Li Xu Wang Longxiang Li Yang Bai Qiang Cheng Zhiyu Zhang Ruigang Li Wa Tang Xuefeng Zeng Weijie Deng Feng Zhang | 2022 | Light(Science & Applications)2022，11，12： | 3 |
您所在的机构暂未开通此部分的功能，请联系管理员